CO2 Injection & Bubbler
CO2 Injection & Bubbler
KL-AIR for CO 2 Injection & Bubbler
Schematic Diagram
Semi-conductor and Display industry require significant amount of deionized water for cleaning process. Dissolved CO 2 in the deionized
water reduces electric conductivity of the surface of wafers and display glasses, which is necessary to reduce the defect rate of the
production line. KL-AIR provides both CO 2 injection membrane module and CO 2 bubbler device as well.
Key Applications
KL-AIR Product Specifications
Why KL-AIR for CO2 bubbler?
● KL-AIR is a patent-protected membrane manufacturer
● Fast CO2 dissolution time
● Simple design reduces maintenance requirements
● Real time data transfer system provides user’s convenience
CO2 Injection Membrane / CO2 Bubbler
Performance Diagram
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Pervaporation & Vapor Permeation
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Oxygen Enrichment System